P06 Shape Measurement of Sub-regions in Spherical Mirror Model by using Phase Shift Method and Sampling Moire Method and Investigation on their Synthesizing Method

Abstract

A surface shape measurement for two sub-regions of the spherical mirror model whose surface shape was processed with 10x10^<-6> m accuracy was performed by using the grating projection method with a phase-shift method and a sampling moire method, and technical issues on the whole field shape measurement proposed in the past studies, which synthesizes several measurement results on sub-regions to measure the large space structures, was investigated. Comparing the synthesizing results of the measurement data to the actual surface feature of the mirror models, characteristics of the synthesizing results were discussed.