抄録
In solid/liquid/gas interfaces, with gas dissolution, absorption or adsorption phenomena, marangoni convection which is resulted from concentration difference and temperature difference is expressed. External force such as liquid frequency, micro gravity is operating in this region, a meniscus of edge becomes a thin film and, it is observed that intense flow is developed due to a concentration difference. There are various heat and mass transfer processes with marangoni convection. Among those processes, in this report, our purpose is to clarity phenomena which is to cleaning and drying semiconductors on manufacturing process.
