Abstract
Micro-cantilever shows a high-speed and high-sensitivity response to a thermal input because it has high thermal resistance and small thermal capacity. Three attempts in thermal measurements with MEMS cantilever sensors will be presented. First, a quantitative temperature measurement in SThM was realized by a thermal feedback method with a multi-functional cantilever probe. Second, a radiation temperature measurement system impervious to a variation in sensitivity of an amplifier and the sensor was demonstrated by a similar feedback method. Third, the cantilever prove for SThM was applied to a thermal analysis. Solidification and melting of an alloy of less than 1μg was observed. The attempts each offer exciting prospects of exceeding the conventional technology.
