Abstract
A micro flow regulating element for integrated chemical devices was developed and its thermal behavior was evaluated. The temperature dependence of liquid viscosity was utilized to perform a continuous volume flow control in nano-liter/minute region, without mechanically actuated parts. A parylene-based suspended micro channel with a heater and a temperature sensor was realized for thermal insulation. The amounts of thermal energy losses to the substrate and the ambient air were estimated through a model calculation. The experiment using a prototype device demonstrated a reasonable flow regulation performance. The results of energy loss estimation were compared with the experiment, and the causes of discrepancies were discussed.
