G223 ディスプレイ部材・μ-TASチップなど表面に微細パターンを有するプラスチック製品創成のための溶融微細転写法の開発(OS-13 材料加工における熱工学関連技術II)

抄録

In this study we developed a new molding process called "Melt Replication Process" to fabricate thermoplastic products with 3-dimensional geometry, thin wall, large area, precise microstructures, high optical-transparency, low residual stress and low birefringence under very low pressure less than 10MPa. Furthermore, we demonstrated its applicability to display parts and μ-TAS(Micro-Total Analysis Systems) chips. From our experiments using COP(Cyclo-Olefin Polymer), the products with microstructures ranging from tens of nm to hundreds of μ m could be fabricated with transcript ratio over 95% and with very low pressure within short cycle time. Particularly, in the case of μ-TAS chip which has pillars with 20μ m in diameter and 50μ m in height, high replication ratios larger than 95% could be attained. Furthermore, the homogeneous transcription of microstructures over the large surface area of the molded product was confirmed.