Abstract
We fabricated bismuth-telluride based thin films and their in-plane thermoelectric micro-generators on a free standing silicon nitride thin film by using the flash evaporation method through shadow masks. The shadow masks are fabricated by standard micro-fabrication processes. The fabricated micro-generators are just put on a heated plate, and the open-circuit output voltages of micro-generators are measured by a digital voltmeter. The maximum measured voltage is about 40mV at 10K temperature difference. The output voltage is comparable to the bulk value although the device consists of as-grown thin films.
