Abstract
Micro and nano-scale systems are explained and these are categorized in terms of heat and fluid flow phenomena. Some typical application of nano and micro machines are presented. Heat and fluid flow phenomena of nano-micro spatio-temporal systems are described as follows Micro-system: ・The size of the machine element is from 1μm to 1mm. ・The fluid motion and heat transfer can be treated as continuum, and is described by Navier-Stokes equations and Fourier's law. Nano-system: ・The fluid can not be treated as continuum any more. ・Discontinuity and wave characteristics of fluid and energy have to be considered.
