抄録
In order to achieve in situ viscosity measurement, we have developed a new miniaturized optical viscosity sensor, namely MOVS (Micro Optical Viscosity Sensor), based on a laser-induced capillary wave (LiCW) method enabling high speed, small sample volume and non-contact measurement of sample viscosity. The newly integrated optical surface tracking system makes possible the stable viscosity measurement under external disturbances. In this study, by integrating the optical surface tracking system, nanosecond damping oscillation of LiCW is successfully observed in the presence of high speed evaporation (speed of 1 micrometer per second) and external forced vibration.