抄録
The technical development makes devices downsizing. There are some devices that causing functional disorder with the water or some devices that humidity adjustment is necessary for driving, and humidity measurement for the small space is required. A new small humidity sensor based on the principle of a psychrometer was proposed. The sensor is made by using the thermocouple (ψ100μm) as a dry-bulb and applying a polymer having water retentivity in substitution for gauze as a wet-bulb. As a result, the invasion diameter became 0.3mm in a minimum.
