抄録
We present a novel application of the MEMS technology to a non-contact gripper using arrayed spiral air flows, in order to mitigate flow-induced vibration during the levitation of objects. For handling fragile objects such as silicon wafers and solar panels, we employ a gripping technology with continuous air-blowing, which would enable damage-free handling without contamination. MEMS-based grippers in a size of 5 inch square are demonstrated in this study. It is shown that the attraction force is successfully obtained by the negative pressure of a spiral flow in each chamber, and that open holes play an important role in eliminating the interaction between the neighboring chambers and narrowing the holding gap so as to increase the force density over the entire object.
