抄録
Efficient optimal control scheme for transient temperature profile in micro devices has been developed based on the adjoint equation of one-dimensional heat conduction in solid layers. Surface heat flux applied with a thin-film heater is employed as the control input in order to minimize temperature changes of a thin active layer embedded in a modeled laser diode. The present feed-forward control scheme provides the optimal heat input, of which magnitude is predominant prior to the onset of a laser pulse. Both in numerical simulations and MEMS-based experiments, the temperature variation during the laser emission can be successfully suppressed by more than 60 % with the present control.
