Abstract
A new technique for measuring in-plane thermal conductivity of a thin film using a "micro-beam" MEMS sensor was proposed. The principle of the measurement is primarily based on the fact that the steady-state temperature rise of a heated beam-type sensor in a vacuum depends on the heat conductance of the sensor and to determine the thermal conductivity of the film by comparing the temperature rise of the heated senor before and after the deposition of the sample film on the senor. The feasibility of the method was demonstrated by measuring the thermal conductivity of a platinum film deposited on a prototype platinum sensor.
