Abstract
The role of nucleation temperature of constituents used in the synthesis processes of metal boride nanoparticles by RF thermal plasma was investigated. In titanium and boron system, boron is nucleated first due to the high nucleation temperature, then titanium and boron vapors co-condense on the boron nuclei. In aluminum and boron, and yttrium and boron systems, boron cluster is formed after the boron nucleation. The formation of boron cluster is the key process for the boron-rich compound.