Abstract
Horizontal temperature distribution on a heated disc set in cylindrical flow channel has been measured to understand heat transfer in a reactor of chemical vapor deposition (CVD). The amplitude of the temperature at middle region of the heated disc was largest because the stagnant point of some vortexes by natural convection could become unstable due to mixing with the forced convection of air supply. The difference of the heat flux between at the center of the disc and at the edge of the disc for the domination by natural convection was much higher than that for the domination by forced convection.
