The Proceedings of the Thermal Engineering Conference
Online ISSN : 2424-290X
2016
Session ID : H225
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Thermal Evaluation of MEMS Radiator Using Near-field Effect in Multi-Layered Structure
Seungchul OhHirotaka NakajimaAi UenoKenichi MorimotoYuji Suzuki
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Abstract

For precise thermal control in satellites under varying internal heat dissipation and thermal boundary condition, we have proposed a MEMS radiator enhanced by near-field effect. Here, we analyse the near-field effect in multi-layered structure in order to estimate the effect of the dielectric layer on the device performance. It is shown that the ON/OFF heat flux ratio of 4.1 can be achieved with a 50 nm-thick SiO2 layer sandwiched between the electrodes. Also, it is experimentally shown that, with our prototype radiator, 2.4 times enhancement in the radiation heat flux has been obtained.

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© 2016 The Japan Society of Mechanical Engineers
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