多層構造の近接場効果を用いた MEMS ラジエータの熱的評価

抄録

For precise thermal control in satellites under varying internal heat dissipation and thermal boundary condition, we have proposed a MEMS radiator enhanced by near-field effect. Here, we analyse the near-field effect in multi-layered structure in order to estimate the effect of the dielectric layer on the device performance. It is shown that the ON/OFF heat flux ratio of 4.1 can be achieved with a 50 nm-thick SiO₂ layer sandwiched between the electrodes. Also, it is experimentally shown that, with our prototype radiator, 2.4 times enhancement in the radiation heat flux has been obtained.