502 Grinding characteristics of Multi-axis Ultraprecision Mirror Surface Machining System in Metal Mold Material

Abstract

ELID grinding technique is expected to contribute greatly to precision grinding, particularly in the field of mirror finishing hard and brittle materials. ELID-grinding can produce ultraprecision grinding performances especially under specific machine such as hydrostatic bearing and submicron feeding control. The authors thus proposed a new ultraprecision mirror surface machining system with ELID. The machine has three linear axes, which can be controlled at a feeding resolution of 10nm under full closed feedback, 3-axes double hydrostatic guideway are used for sliding the machine, and hydrostatic bearing is used for the grinding wheel spindle. This paper introduces the concept of the developed ultraprecision ELID-grinding system, the specifications, and trial use in metal mold material.