The Proceedings of Conference of Tohoku Branch
Online ISSN : 2424-2713
2000
Session ID : 503
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503 Ultraprecision Polishing Method of Large Scale X-Ray Mirrors
Weimin LIN, Hitoshi OHMORI, Yutaka YAMAGATA, Sei Moriyasu, Akitake MAKINOUCHI, Changling LIU
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Keywords: X-Ray Mirrors, Polishing, Fused Silica Glass, Surface Roughness, Form Accuracy
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Abstract
This paper describes an ultraprecision polishing method of larger scale x-ray mirrors, and the polishing characteristics. The X-ray mirrors which ELID-grinding ground high form accuracy with #4000 cast iron bonded diamond wheel, it was took polishing with NC control polishing machine. The results, very good ground surface of Ra 1nm mirror can be achieved.
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© 2000 The Japan Society of Mechanical Engineers
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