504 CVD-SiC X-ray mirror of Ultraprecision Grinding with ELID(electrolytic in-process dressing)

Abstract

This paper describes that a CVD-SiC X-ray mirror with the cylindrical surface was grinded by using ultraprecision micro-form generating machine with ELID system. The grinding wheels used were trued in a R-shape with a high profile accuracy by the micro EDT device on the machine. As an grinding experimental result, a good form accuracy could be achieved successfully.