The Proceedings of Conference of Tohoku Branch
Online ISSN : 2424-2713
2000
Session ID : 513
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513 Micro-Fabrication by Linear motor profiler with Main spindle of Ultra high rotation speed of the three hundred thousand revolution per minutes
Hitoshi OHMORI, Yoshihiro UEHARA, Sei MORIYASU, Yutaka YAMAGATA, Weimin LIN, Masahiro ANZAI, Ichiro TAKAHASHI
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Keywords: ELID(Electrolytic In-Process Dressing), Linear Motor, Micro-Fabrication
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Abstract
In this study, we developed Linear motor profiler with the main spindle of ultra high rotation speed of three hundred thousand revolution per minute. This paper describes features and problems of the Linear motor profiler with Main spindle of Ultra high rotation speed.
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© 2000 The Japan Society of Mechanical Engineers
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