The Proceedings of Conference of Tohoku Branch
Online ISSN : 2424-2713
2002.37
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Clean up of Exhaust Gas Using Low-Temperature Plasma
Shigeaki INADA, Masaki KOIKE, Akira IIJIMA
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Keywords: Low Temperature Plasma, Hydrogen Chloride, Clean Up, Titanium Chloride, Nitrogen Chloride, Nitrogen Plasma, Titanium Mesh
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Pages 170-171

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© 2002 The Japan Society of Mechanical Engineers
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