The Proceedings of Conference of Tohoku Branch
Online ISSN : 2424-2713
2006.41
Session ID : 122
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122 Effect of Defects and Strain on the Band Gap of HfO_2 and ZrO_2 Films analyzed by Ouantum Chemical Molecular Dynamics
Yuta ITO, Ken SUZUKI, Hideo MIURA
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Keywords: Molecular Dynamics, Reliability, Band Gap, HfO_2 Film, Lattice Defect
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© 2006 The Japan Society of Mechanical Engineers
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