The Proceedings of Conference of Tohoku Branch
Online ISSN : 2424-2713
2007.42
Session ID : 136
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136 Evaluation of Electrical Conductivity of Thin Metallic Films by Eddy Current Microscopy
Hironori TOHMYOH, Koushi SAKOMIZU, Masumi SAKA
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Keywords: Scanning Probe Microscopy, Eddy Current, Electrical Conductivity, Thin Film, Non-contact Measurement
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© 2007 The Japan Society of Mechanical Engineers
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