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Published: March 13, 2007
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Article type: Index
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[in Japanese], [in Japanese]
Article type: Article
Pages
1-
Published: March 13, 2007
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Satoshi ASAKURA, Hideki ONODERA
Article type: Article
Session ID: 101
Published: March 13, 2007
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Hiroyuki SAWADA, Hideki ONODERA
Article type: Article
Session ID: 102
Published: March 13, 2007
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Mitsuru Shimagaki, Toshiya Kimura, Hideaki Nanri, Syusuke Hori, Tomoyu ...
Article type: Article
Session ID: 103
Published: March 13, 2007
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Masaya SUZUKI, Takashi WATANABE, Hiroyuki FURUKAWA
Article type: Article
Session ID: 104
Published: March 13, 2007
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Satoshi HORIKAWA, Masaya SHIGETA, Seiichiro IZAWA, Yu FUKUNISHI
Article type: Article
Session ID: 105
Published: March 13, 2007
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Michiharu WATANABE, Masaya SHIGETA, Seiichiro IZAWA, Yu FUKUNISHI
Article type: Article
Session ID: 106
Published: March 13, 2007
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Sachi FUJINUMA, Ken-ichi FUNAZAKI, Kazutoyo YAMADA
Article type: Article
Session ID: 107
Published: March 13, 2007
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Yuta KATAYAMA, Akira SATOH
Article type: Article
Session ID: 108
Published: March 13, 2007
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Suguru SUZUKI, Takashi WATANABE
Article type: Article
Session ID: 109
Published: March 13, 2007
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Ryuichi CHIBA, Sergei FOMIN, Vladimir CHUGUNOV, Yuichi NIIBORI, Toshiy ...
Article type: Article
Session ID: 110
Published: March 13, 2007
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Isao TAKATAMA
Article type: Article
Session ID: 111
Published: March 13, 2007
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Satoshi HASEGAWA, Noriaki NAKAMURA, Tomoyuki HASHIMOTO, Mitsuo WATANAB ...
Article type: Article
Session ID: 112
Published: March 13, 2007
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Katsuji NAGAURA, Mitsuo WATANABE, Satoshi HASEGAWA, Tomoyuki HASHIMOTO ...
Article type: Article
Session ID: 113
Published: March 13, 2007
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Yusuke MIKI, Masaya SHIGETA, Seiichiro IZAWA, Yu FUKUNISHI
Article type: Article
Session ID: 114
Published: March 13, 2007
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Taihei KAHISBE, Hajime ITOH
Article type: Article
Session ID: 115
Published: March 13, 2007
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Hiroo KAKUTA, Satoshi YAMADA, Yuichiro ASAGA, Hoshio TSUJITA, Shimpei ...
Article type: Article
Session ID: 116
Published: March 13, 2007
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Seiichi SUDO, Yuichi KUROSU, Tetsuya YANO, M.I. SHLIOMIS
Article type: Article
Session ID: 118
Published: March 13, 2007
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Masaki ONODERA, Tomoki NAKAJIMA, Junji IGAWA, Hideya NISHIYAMA
Article type: Article
Session ID: 119
Published: March 13, 2007
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Yosuke SHII, Masashi SAKURAI, Ichiro KANO, Ichiro TAKAHASHI, Tatsuo NI ...
Article type: Article
Session ID: 120
Published: March 13, 2007
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Ryota YASUI, Masato AKAMATSU, Mitsuo HIGANO
Article type: Article
Session ID: 121
Published: March 13, 2007
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Ryuji Sugiura, Kazuto Suzuki, A.Toshimitsu Yokobori Jr, Masaaki Tabuch ...
Article type: Article
Session ID: 122
Published: March 13, 2007
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Hiroaki TAKEUCHI, Shinji HOSONO, Daisuke KOBAYASHI, Toshimitsu YOKOBOR ...
Article type: Article
Session ID: 123
Published: March 13, 2007
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Ryu MATSUZAKI, Tsutomu EZUMI
Article type: Article
Session ID: 124
Published: March 13, 2007
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Shinya SATO, Yoichi HATAKEYAMA, Kazumune KATAGIRI, Koichi KASABA
Article type: Article
Session ID: 125
Published: March 13, 2007
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Masahiko KANEHAMA
Article type: Article
Session ID: 126
Published: March 13, 2007
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Naoki SATO, Mitsuo KOBAYASHI, Yoshihiro KUBOTA, Takashi KATOH, Kaoru H ...
Article type: Article
Session ID: 127
Published: March 13, 2007
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Mitsuru WATANABE, Kazumune KATAGIRI, Koichi KASABA, Masakazu ONUMA, Sa ...
Article type: Article
Session ID: 128
Published: March 13, 2007
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Koki HASHIMOTO, Tsutomu EZUMI
Article type: Article
Session ID: 129
Published: March 13, 2007
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Hisashi ITO, Toshimitsu YOKOBORI
Article type: Article
Session ID: 130
Published: March 13, 2007
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Hiroshi SUZUKI, Kazuyuki TACHIBANA
Article type: Article
Session ID: 131
Published: March 13, 2007
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Jun NAKAGAWA, Fumio NARITA, Yasuhide SHINDO
Article type: Article
Session ID: 132
Published: March 13, 2007
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Nobuhiro NAITO, Yuki NAGAO, Noriko SATA, Fumitada IGUCHI, Hiroo YUGAMI
Article type: Article
Session ID: 133
Published: March 13, 2007
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Ryo NAGAOKA, Tsutomu EZUMI
Article type: Article
Session ID: 134
Published: March 13, 2007
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Kenichiro SUZUKI, Tetsuya UCHIMOTO, Toshiyuki TAKAGI, Takeshi SATO, Ph ...
Article type: Article
Session ID: 135
Published: March 13, 2007
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Hironori TOHMYOH, Koushi SAKOMIZU, Masumi SAKA
Article type: Article
Session ID: 136
Published: March 13, 2007
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Jun MATSUKAWA, Tetsuya UCHIMOTO, Toshihiko ABE, Toshiyuki TAKAGI, Take ...
Article type: Article
Session ID: 137
Published: March 13, 2007
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Takuma SUZUKI, Hironori TOHMYOH, Masumi SAKA, S. Reaz AHMED
Article type: Article
Session ID: 138
Published: March 13, 2007
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Naoyuki Maehata, Osamu Yokota, Katunori Demura
Article type: Article
Session ID: 139
Published: March 13, 2007
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Naoki YOSHIDA, Hiroyuki MIKI, Toshihiko ABE, Toshiyuki TAKAGI
Article type: Article
Session ID: 140
Published: March 13, 2007
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Hitoshi SOYAMA, Nao YAMADA
Article type: Article
Session ID: 141
Published: March 13, 2007
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Muneyuki OTANI, Kinji TAMAKAWA, Hideo MIURA
Article type: Article
Session ID: 142
Published: March 13, 2007
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Electroplated Cu thin films have begun to be used for interconnections of semiconductor devices. Since properties of Cu thin films depend on the micro structure of them, their properties can be controlled by controlling their structures. However, which is not clarified yet. Therefore reliability degradation of semiconductor devices becomes serious problem. So, mechanical properties of some electroplated Cu thin films were measured by nanoindentation technique. Young's modulus of some films varied drastically depending on electroplating condition
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Kazuya Iino, Takaaki EGUCHI, Hiroyuki YAGUCHI
Article type: Article
Session ID: 143
Published: March 13, 2007
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Shinya Azuma, Haruo Shimosaka, Noburo Ehara
Article type: Article
Session ID: 144
Published: March 13, 2007
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Junya Kondou, Haruo Shimosaka, Noburo Ehara
Article type: Article
Session ID: 145
Published: March 13, 2007
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