The Proceedings of Conference of Tohoku Branch
Online ISSN : 2424-2713
2008.43
Session ID : 224
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224 Introduction of Oxidation-Induced Stacking Faults in Silicon Wafer through SiO_2 Layer by Cavitation Jet
Akira KAI, Hitoshi SOYAMA
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Keywords: Silicon Wafer, Oxidation-Induced Stacking Faults, Cavitation Jet, Surface Treatment, Gettering
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© 2008 The Japan Society of Mechanical Engineers
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