Abstract
Micro cutting technology is one of the important methods to fabricate micro-sized precision components in the semiconductor, electronics, and electro-mechanics industries. However, PEEK, which is a thermoplastic resin, has a problem that the hole accuracy is lowered due to the cutting heat. This paper describes drilling experiments with cooling on workpiece by cold air. As a result, it was found that cooling the workpiece is effective to suppressing the cutting heat and improve hole accuracy. Within the experimental conditions, the combination of non-step drilling and cooling enables high-precision drilling with approximately the same accuracy as step drilling.
