The Proceedings of Conference of Tohoku Branch
Online ISSN : 2424-2713
2008.43
Session ID : 113
Conference information
113 Micro texture dependence of characteristics of electroplated Cu-thin-films for interconnections
Muneyuki OTANI, Kinji TAMAKAWA, Ken SUZUKI, Hideo MIURA
Author information
Keywords: Current density, Micro texture, Electroplated Copper Thin Film
CONFERENCE PROCEEDINGS FREE ACCESS

Details
Download PDF (410K)
Download citation RIS

(compatible with EndNote, Reference Manager, ProCite, RefWorks)

BIB TEX

(compatible with BibDesk, LaTeX)

Text
How to download citation
Contact us
Article 1st page
Content from these authors
© 2008 The Japan Society of Mechanical Engineers
Previous article Next article
Favorites & Alerts

Recently viewed articles
Announcements from publisher
Share this page
feedback
 Top