The Proceedings of Conference of Tohoku Branch
Online ISSN : 2424-2713
2010.45
Session ID : 188
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188 An optical sensor for measurement of angular motions of a planar motion stage
Hiroshi MUTO, Yusuke SAITO, Yoshikazu ARAI, Wei GAO
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Keywords: planer motion stage, three-axis angular motion, laser autocollimation
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© 2010 The Japan Society of Mechanical Engineers
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