The Proceedings of Conference of Tohoku Branch
Online ISSN : 2424-2713
2011.46
Session ID : 201
Conference information
201 Development of Friction Drive System for Ultra-precision-positioning Stage with High Speed in Vacuum
Tomoshi ISOZAKI, Kazumasa ASUMI, Yutaka INADA, Koshi ADACHI
Author information
Keywords: Friction drive, Ultrasonic motor, Precision-positioning, Vacuum
CONFERENCE PROCEEDINGS FREE ACCESS

Details
Download PDF (391K)
Download citation RIS

(compatible with EndNote, Reference Manager, ProCite, RefWorks)

BIB TEX

(compatible with BibDesk, LaTeX)

Text
How to download citation
Contact us
Article 1st page
Content from these authors
© 2011 The Japan Society of Mechanical Engineers
Previous article Next article
Favorites & Alerts

Recently viewed articles
Announcements from publisher
Share this page
feedback
 Top