抄録
Conventional software datums for straightness profile measurement are error separation techniques that separate a surface profile from parasitic motions by using multiple sensors and/or multiple arrangements. However, random error propagation of the multiple sensor method has been reported in the case of large sampling numbers. The authors already proposed the novel two-point method for straightness profile measurement. The proposed method can reduce the propagation of uncertainty caused by the cross-axis motion, pitch motion and random error of the estimated surface profile. The proposed method consists of a weighted addition and inverse filtering. The suitable weight of the weighted addition that gives the least uncertainty propagation is derived by a simple equation using the standard deviation of the cross-axis motion, pitch motion and random error. Here, the authors discussed the characteristics of the pitch motion in the spatial frequency domain.
