The Proceedings of Conference of Tokai Branch
Online ISSN : 2424-2748
2000.49
Session ID : 428
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428 Tribological Properties of C-N Thin Films Prepared by Ion-Beam-Assisted Deposition : Effect of Ar Ion Assist)
[in Japanese], [in Japanese], [in Japanese], [in Japanese]
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Keywords: Ion-Beam-Assisted Deposition, Tribological Properties, Carbon Nitride, Thin Film
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© 2000 The Japan Society of Mechanical Engineers
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