403 Synthesis and Mechanical Properties of C-N-Si Thin Films

The Proceedings of Conference of Tokai Branch

Online ISSN : 2424-2748

2001.50

Session ID : 403

DOI https://doi.org/10.1299/jsmetokai.2001.50.185

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403 Synthesis and Mechanical Properties of C-N-Si Thin Films

Kazuki Yaga, Akihito Matsumuro, Hidenobu Ohta

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Keywords: C-N-Si thin film, Ion beam-Assisted Deposition, Mechanical properties

CONFERENCE PROCEEDINGS FREE ACCESS

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© 2001 The Japan Society of Mechanical Engineers

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