The Proceedings of Conference of Tokai Branch
Online ISSN : 2424-2748
2008.57
Session ID : 401
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401 Study on Control of Nonequilibrium Plasma Chemical Reactions for Carbon Materials Synthesis
Tomoyuki KAMIMURA, Kazuhiro ISHIMARU
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Keywords: Nonequilibrium Plasma, RF Discharge, Pulse Modulated Mode, He Mixture, Carbon Materials, CVD
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© 2008 The Japan Society of Mechanical Engineers
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