The Proceedings of Conference of Tokai Branch
Online ISSN : 2424-2748
2011.60
Session ID : 563
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563 Synthesis and Evaluation of cBN thin film from B_2O_3 by using pulsed DC plasma CVD method
Takafumi NishidaTakahiro KawamuraShigeo KotakeYasuyuki Suzuki
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© 2011 The Japan Society of Mechanical Engineers
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