The Proceedings of Conference of Tokai Branch
Online ISSN : 2424-2748
2011.60
Session ID : 564
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564 Synthesis of TiN thin film from TiO_2 by pulsed DC-plasma CVD
Takahiro TanakaTakahiro KawamuraYasuyuki SuzukiShigeo Kotake
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© 2011 The Japan Society of Mechanical Engineers
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