The Proceedings of Conference of Tokai Branch
Online ISSN : 2424-2748
2012.61
Session ID : 312
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312 Application of RF Inductively Coupled Plasma to Synthetic Process of Carbon Materials
Kenya KOBAYASHI, Kazuhiro ISHIMARU
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Keywords: RF Inductively Coupled Plasma, Nonequilibrium Condition, Carbon Materials, CVD
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© 2012 The Japan Society of Mechanical Engineers
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