The Proceedings of Conference of Tokai Branch
Online ISSN : 2424-2748
2012.61
Session ID : 525
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525 Micro-scale observation by electron beam induced current of fatigue process of silicon
Ryutaro HIRAI, Shoji KAMIYA, Hayato IZUMI, Noritsugu UMEHARA
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Keywords: Single Crystalline Silicon, Fatigue Mechanism, EBIC, ESEM, Defect
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© 2012 The Japan Society of Mechanical Engineers
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