The Proceedings of Conference of Tokai Branch
Online ISSN : 2424-2748
2012.61
Session ID : 608
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608 Raman Spectrum in Si by using Polarized Raman Micro Spectroscopy in Oblique Backscattering Configuration.
Yuya SUZUKI, Yuya YATSU, Takahiro SUZUKI, Takuto ICHIKAWA, Hirohisa KIMACHI
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Keywords: Raman, Si, Oblique backscattering, Polarization, Crystallographic orientation
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© 2012 The Japan Society of Mechanical Engineers
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