231 Effect of Ar gas on the mechanical characteristics of DLC films

The Proceedings of Conference of Tokai Branch

Online ISSN : 2424-2748

2015.64

Session ID : 231

DOI https://doi.org/10.1299/jsmetokai.2015.64._231-1_

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231 Effect of Ar gas on the mechanical characteristics of DLC films

Kenta MIZUTANI, Petros ABRAHA

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Keywords: DLC film, Ar gas

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© 2015 The Japan Society of Mechanical Engineers

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