The Proceedings of Conference of Tokai Branch
Online ISSN : 2424-2748
2016.65
Session ID : 108
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108 Hydrophilic treatment of DLC films in O_2 plasma using Electron beam exited plasma device
Tatsuya KODAMA, Petros ABRAHA
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Keywords: DLC, O_2 plasma, O, C, Contact angle, Negative bias voltage
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© 2016 The Japan Society of Mechanical Engineers
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