The Proceedings of Conference of Tokai Branch
Online ISSN : 2424-2748
2016.65
Session ID : 109
Conference information
109 Influence of the film structure on the tribological property of Si-DLC deposited by ultra-high-speed coating with MVP method
Toshimistu NAKANO, Hiroyuki KOUSAKA, Hotaka SHIBASAWA, Hiroyuki HASHITOMI
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Keywords: a-C:H:Si, PECVD, Friction, Surface analysis
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© 2016 The Japan Society of Mechanical Engineers
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