Proceedings of the 1992 Annual Meeting of JSME/MMD
Online ISSN : 2433-1287
2004
Session ID : 416
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Layout Dependence Caused by Shallow-Trench-Isolation-Induced Stress of MOSFET's Drain-Current
Yukihiro KUMAGAIHiroyuki OHTAKeiichi MAEKAWA
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© 2004 The Japan Society of Mechanical Engineers
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