Proceedings of the 1992 Annual Meeting of JSME/MMD
Online ISSN : 2433-1287
2004
Session ID : 733
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Development of Microactuators Using R-phase Transformation of Ti-Ni SMA Thin Film
Masanari TomozawaShuichi Miyazaki
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Abstract
Diaphragm-type microactuators using the R-phase transformation of a Ti-Ni shape memory alloy (SMA) thin film were fabricated by r.f. magnetron sputtering. The transformation temperature hysteresis of the microactuator was 3.2K that was extremely small compared with a microactuator using the martensitic transformation of the Ti-Ni SMA thin film. The microactuator using the R-phase transformation worked at the frequency of 125Hz.
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© 2004 The Japan Society of Mechanical Engineers
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