Abstract
Diaphragm-type microactuators using the R-phase transformation of a Ti-Ni shape memory alloy (SMA) thin film were fabricated by r.f. magnetron sputtering. The transformation temperature hysteresis of the microactuator was 3.2K that was extremely small compared with a microactuator using the martensitic transformation of the Ti-Ni SMA thin film. The microactuator using the R-phase transformation worked at the frequency of 125Hz.
