抄録
We have measured the complete set of elastic moduli Cij of an Fe-Si-B amorphous-alloy thin film using thickness resonance with electromagnetic acoustic resonance (EMAR) and newly developed resonance ultrasound spectroscopy (RUS)/laser methods. From the thickness-resonance measurements, out-of-plane shear moduli (C44 and C55) were found to be 73.2 and 71.0 (GPa). This indicates that the amorphous-alloy thin film shows transverse-isotropy elastic symmetry. RUS/laser measurements gave the remaining moduli : C11=193.6, C33=234.3, C23=72.1, C12=79.8 and C44=72.1 (GPa). From the ratios of the elastic modulus, (C33/C11=1.21 and C44/C66=1.26), the amorphous Fe-Si-B thin film shows elastic anisotropy between in-plane and the out-of-plane directions in the range of 20-30%. These results also indicate that this ultrasonic technique is also applicable for measuring all Cij of other thin films.
