4探針型原子間力顕微技術による局所領域における導電率の定量評価

抄録

Development of an atomic force microscope (AFM) probe for local electrical conductivity measurement is reviewed. Electrical conductivity of a 99.999% aluminum wire having a 400nm width and a 350nm thickness was measured by the four-point (4P) AFM probe. This technique is a combination of the principles of the four-point-probe method and standard AFM. The instrument is capable of simultaneously measuring both surface topography and local conductivity. The repeatability of conductivity measurements indicates that this 4P-AFM probe could be used for fast in situ characterization of local electrical properties of nanocircuits and nanodevices.