抄録
Glass-like carbon (GC) is expected as a die material for press molding of glass micro optical devices. However, the mechanical and thermal properties are not enough to use as precision mold die. So, GC composites reinforced by vapor grown carbon fiber (GC/VGCF composites) were developed to improve the properties. The GC/VGCF composites achieved high thermal conductivity and bending strength, and the decreased linear expansion coefficient and good mold releasability. However, surface roughness of the GC/VGCF composites after focused ion beam (FIB) etching increased up to 50nm, when VGCF of 28vol% was added.
