PREPARATION AND PYROELECTRIC PROPERTIES OF ZIRCONIUM-MODIFIED LEAD LANTHANUM TITANATE CERAMICS AND THIN FILMS

抄録

Zirconium-modified lead lanthanum titanate {(Pb0.925La0.075)(Zr_yTi_1-y)0.981O₃+0.5 mass% MnO₂, y=0-0.10, (PLZT)} ceramics and films were prepared by hot isostatic pressing and rf-magnetron sputtering, respectively. The pyroelectric properties of PLZT ceramics and films were investigated in detail. Assuming that the volume specific heat C_v of present ceramics and films is 3.2J/cm³°C, the PLZT films exhibited the highest figures of merit F.M. of 1.4×10^-10Ccm/J for voltage responsivity and F.M.D^* of 1.6×10^-8Ccm/J for specific detectivity of pyroelectric infrared sensors, which were around 7.0 times and 2.8 times, respectively, larger than those of present ceramics and PLZT(4/44/56) ceramics previously reported. The present films of y=0.04-0.10 are substantially expected as element materials for pyroelectric infrared sensors.