抄録
The residual stress and various characteristics of Ti-N films coated on the surface of SKH51 substrate by ion beam mixing technique were examined. As a result, it was found that the wear characteristic of the films in which Ti2N phase coexisted with TiN phase was better than that of the TiN single phase films, though the dynamic hardness of the former films was lower than that of the latter films. When a small amount of Ti2N phase existed in TiN phase matrix, both the residual stress and the particle size of TiN phase showed a minimum. As to the TiN+Ti2N two phase films coated with the same N/Ti supply ratio, the specific wear rate was decreased when the residual stress of the film was increased.
