抄録
Recently, the position-sensitive detector (PSD) has been becoming popular for X-ray stress measurement. However, little information is available regarding the effects of systematic errors, including mis-setting of specimen and misalignment of collimator and detector, on the stress measurement. Many factors, such as stress and X-ray diffraction broadening of the specimen, X-ray focus size, dimensions of the collimator and the PSD, and goniometer radius, are complicatedly related to the effects of the systematic errors. In this paper, a model of the Ψ assembly (the side inclination method) X-ray stress measurement using a PSD as the detector is presented, which enables us to simulate the stress measurement under various conditions of systematic errors.
