Abstract
The present paper deals with the LD-pumped YAG laser processing technique for transparent conductive oxide, which has been used in solar cells as a transparent electrode. The effect of pulse width on damage caused to the glass substrates is investigated theoretically and experimentally. And then laser power and the distance between focal point of the lens and the substrate (defocused distance) are investigated. It is found that LD-pumped YAG laser, which has a short pulse width, can be used to pattern SnO2 without damaging the glass substrate. And the characteristics of the machined groove can be changed by changing the laser power and defocused distance. Consequentially, a high quality groove, which has high electrical resistance and aspect ratio, can be obtained.
